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MRS develops and produces a number of custom hardware and software
modules for semiconductor wafer metrology companies including:
- Electromagnetic deflection amplifiers and column control modules
for E-Beam wafer inspection systems
- High frequency column drivers for direct write E-beam systems
- High frequency, low noise trans-impedance amplifier, data acquisition
system for wafer inspection systems
- Electrostatic deflection amplifiers and column control modules
for multicolumn E-Beam wafer inspection system
- Front-end electronics and data acquisition system for bare wafer
inspection system
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