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wafer inspection

MRS develops and produces a number of custom hardware and software modules for semiconductor wafer metrology companies including:

  • Electromagnetic deflection amplifiers and column control modules for E-Beam wafer inspection systems
  • High frequency column drivers for direct write E-beam systems
  • High frequency, low noise trans-impedance amplifier, data acquisition system for wafer inspection systems
  • Electrostatic deflection amplifiers and column control modules for multicolumn E-Beam wafer inspection system
  • Front-end electronics and data acquisition system for bare wafer inspection system
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